제어로봇시스템학회:학술대회논문집
- 2003.10a
- /
- Pages.1225-1230
- /
- 2003
Real-Time Estimation and Compensation of the Laser Interferometer in Nano-Scale
- Lee, Yong-Woo (Department of Mechanical Engineering, Hanyang University) ;
- Choi, Hyun-Seok (Department of Mechanical Engineering, Hanyang University) ;
- Park, Tong-Jin (Department of Mechanical Engineering, Hanyang University) ;
-
Han, Chang-Soo
(Department of Mechanical Engineering, Hanyang University)
;
- Choi, Tae-Hoon (Korea Institute of Industrial Technology) ;
-
Lee, Nak-Kyu
(Korea Institute of Industrial Technology)
;
- Lee, Hyoung-Wook (Korea Institute of Industrial Technology) ;
- Na, Kyung-Hwan (Korea Institute of Industrial Technology)
- Published : 2003.10.22
Abstract
In this study, Real-time estimation and compensation procedure are developed for the laser interferometer. This system is designed with homodyne quadrature-phase detection method using the Laser interferometer. The errors in this system are due to noise, disturbance and undefined model dynamics. DSP(Digital Signal Processor) is applied for real time compensation of these errors. This estimator and compensation is verified with measurement test.