한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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- Pages.111-115
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- 2003
Liquid Delivery MOCVD공정을 이용한 강유전체 SBT 박막의 제조기술에 관한 연구
A study on Fabrication of Ferroelectric SST Thin Films by Liquid Delivery MOCVD Process
- Kang, Dong-Kyun (Department of Materials Science and Engineering, Korea University) ;
- Paik, Seung-Kyu (Department of Materials Science and Engineering, Korea University) ;
- Kim, Hyoeng-Ki (Department of Materials Science and Engineering, Korea University) ;
- Kim, Byong-Ho (Department of Materials Science and Engineering, Korea University)
- 발행 : 2003.05.16
초록
200nm 정도의 두께를 가진 SBT 박막이 liquid delivery MOCVD 공정에 의해 (111) oriented Pt/Ti/