Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2003.11a
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- Pages.402-402
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- 2003
Effect of slurry abrasive particle on dishing in Shallow Trench Isolation Chemical Mechanical Polishing
STI-CMP공정에서 슬러리 연마입자가 dishing에 미치는 영향
- Ahn Jin-Woo (Department of Material Science and Engineering, Korea University) ;
- Lim Dae-Soon (Department of Material Science and Engineering, Korea University) ;
- Lee Sang-Ick (Hynix Semiconductor)
- Published : 2003.11.01