한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.23-26
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- 2003
BLT 박막을 이용한 MFIS 구조에서 MgO buffer layer의 영향
Effect of the MgO buffer layer for MFIS structure using the BLT thin film
- Lee, Jung-Mi (Chung-Ang University) ;
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Kim, Kyoung-Tae
(Chung-Ang University) ;
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Kim, Chang-Il
(Chung-Ang University)
- 발행 : 2003.11.13
초록
The BLT thin film and MgO buffer layer were fabricated using a metalorganic decomposition method and the DC sputtering technique. The MgO thin film was deposited as a buffer layer on