한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.1192-1195
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- 2003
산화 박막 성장을 위한 $O_3$ 농축 시스템의 구축 및 평가
Construction and Evaluation of $O_3$ Condensation System for Oxide Thin Film
- Lim, Jung-Kwan (Dongshin Univ.) ;
- Ryu, Sun-Jong (Dongshin Univ.) ;
- Park, Yong-Pil (Dongshin Univ.)
- 발행 : 2003.07.10
초록
A highly condensed ozone gas be transferred to the superconductor thin film growth chamber because ozone is strong oxidizing gas. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure.