한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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- Pages.252-255
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- 2003
펄스 레이저 증착법으로 성장된 ZnO 박막의 PL 특성에 대한 신경망 모델링
Neural network based modeling of PL intensity in PLD-grown ZnO Thin Films
- 고영돈 (연세대학교 전기전자공학과) ;
- 강홍성 (연세대학교 전기전자공학과) ;
-
정민창
(연세대학교 금속공학과) ;
- 이상렬 (연세대학교 전기전자공학과) ;
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명재민
(연세대학교 금속공학과) ;
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윤일구
(연세대학교 전기전자공학과)
- Ko, Young-Don (Yonsei Univ.) ;
- Kang, Hong-Seong (Yonsei Univ.) ;
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Jeong, Min-Chang
(Yonsei Univ.) ;
- Lee, Sang-Yeol (Yonsei Univ.) ;
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Myoung, Jae-Min
(Yonsei Univ.) ;
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Yun, Ii-Gu
(Yonsei Univ.)
- 발행 : 2003.07.10
초록
The pulsed laser deposition process modeling is investigated using neural networks based on radial basis function networks and multi-layer perceptron. Two input factors are examined with respect to the PL intensity. In order to minimize the joint confidence region of fabrication process with varying the conditions, D-optimal experimental design technique is performed and photoluminescence intensity is characterized by neural networks. The statistical results were then used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can be optimized process conditions for pulsed laser deposition process.