한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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- Pages.117-121
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- 2003
A 5-17 GHz Wideband Reflection-Type Phase Shifter Using Digitally Operated Capacitive MEMS Switches
- Kim, Jung-Mu (School of Electrical Engineering and Computer Science, Seoul National University) ;
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Lee, Sang-Hyo
(School of Electrical Engineering and Computer Science, Seoul National University) ;
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Park, Jae-Hyoung
(School of Electrical Engineering and Computer Science, Seoul National University) ;
- Baek, Chang-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
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Kwon, Young-Woo
(School of Electrical Engineering and Computer Science, Seoul National University) ;
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Kim, Yong-Kweon
(School of Electrical Engineering and Computer Science, Seoul National University)
- 발행 : 2003.12.01
초록
In this paper, a micromachined low-loss and ultra wide band reflection-type phase shifter (RTPS) is proposed. The phase shifter shows a constant phase shift from 5 to 17 GHz and consists of two cascaded reflection-type phase shifter. Low-loss reflection termination consists of digital capacitive switches, and air-gap overlay CPW couplers are used in order to employ the low-loss 3 dB coupling. The fabricated phase shifter showed the 5 discrete states,
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