한국복합재료학회:학술대회논문집 (Proceedings of the Korean Society For Composite Materials Conference)
- 한국복합재료학회 2003년도 추계학술발표대회 논문집
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- Pages.154-157
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- 2003
광섬유 EFPI 센서를 이용한 실시간 고정밀 변위 측정
Real-time Measurement of Precision Displacement using Fiber Optic EFPI Sensor
초록
Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown, and the sinusoidal approximation algorithm that estimates past and coming fringe values was verified through the linearity. Real-time signal processing program was developed, and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.4 ~ 10 nm in the displacement range of