$LiNbO_3$ Self-aligned Ridge Waveguide with Dielectric Side Buffers

측면 완충영역을 갖는 $LiNbO_3$ 자기정렬 리지 광도파로의 제작

A simple fabrication method of self-aligned ridge waveguides with dielectric side buffers is demonstrated on +Z- cut LiNbO$_3$. The ridge waveguide is fabricated by a combination of the annealed proton exchange process and the proton-exchanged wet etching technique. The self-aligned process is achieved by wet etching of aluminum.