Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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System of a Selenium Based X-ray Detector for Radiography

일반촬영을 위한 셀레늄 기반의 엑스선 검출기 시스템

  • 이동길 (인제대학교 의생명공학대학 의용용학과) ;
  • 박지군 (인제대학교 의생명공학대학 의용용학과) ;
  • 최장용 (인제대학교 의생명공학대학 의용용학과) ;
  • 안상호 (인제대학교 의료영상연구소) ;
  • 남상희 (인제대학교 의료영상연구소)
  • Published : 2002.07.08
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Abstract

Amorphous selenium based flat panel detectors convert incident x-ray to electric signal directly. Flat panel detectors gain more interest real time medical x-ray imaging. TFT array and electric readout circuits are used in this paper offered by LG.Philips.LCD. Detector is based on a $1536{\times}1280$ array of a-Si TFT pixels. X-ray conversion layer(a-Se) is deposited upper TFT array with a $400{\mu}m$ by thermal deposition technology. Thickness uniformity of this layer is made of thickness control system technology$({\leq}5%)$. Each $139{\mu}m{\times}139{\mu}m$ pixel is made of thin film transistor technology, a storage capacitor and collecting electrode having geometrical fill factor of 86%. This system show dynamic performance. Imaging performance is suited for digital radiography imaging substitute by conventional radiography film system.

Keywords