Thermal Effects of Single Silicon Tip Emitters with Various Tip Radii

To investigate thermal effects of silicon field emitter, we fabricated and characterized single silicon tips with various tip radii, which generate different joule heating. Through I-V and stability tests, the changes of emission characteristics and tip structures due to different tip heating were observed and discussed. From the results, we confirmed that the changes of emission characteristics due to thermal effects in silicon emitter could occur at relatively small emission currents and concluded that the thermal effects should be also considered under normal operation condition above 1 ${\mu}A$.