Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.55-55
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- 2002
Physical and Chemical Characteristics of Ceramic Conditioner in Chemical Mechanical Planarization
CMP 공정 중 세라믹 컨디셔너의 물리적, 화학적 특성평가
- Park, Jeom-Yong ;
-
Park, Jin-Gu
;
- Koh, Seung (Hunatech Co.) ;
- Myoung, Beom-Yeong (Hunatech Co.) ;
- Lee, Sang-Ik (Hynix Semiconductor Advanced Process-CMP)
- Published : 2002.11.01
Abstract
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