한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집
- /
- Pages.296-300
- /
- 2002
RF-PECVD에 의해 증착된 a-C:H 박막의 물리적 및 전기적 특성 분석
Physical and electrical properties of a-C:H deposited by RF-PECVD
초록
Thin films of Hydrogenated amorphous carbon(a-C:H) are generally exhibited by high electrical resistivities from 10