Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Formation and charaeteristic of multiphase Ti-Cr-N films forms formed by cathodic aye ion plating

  • Lee, Yong. J. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
  • Lee, Ho.Y. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
  • Kim, Sang.S. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
  • Published : 2001.07.05
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