볼츠만 방정식을 이용한 Xe 가스의 전자 이동속도 해석

The analysis of the electron drift velocity of Xenon gas by Boltzmann-equation

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in Xenon gas calculated for range of E/N values from 0.01~500[Td] at the temperature is $300[^{\circ}K]$ and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. it has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with experimental data by L. S. Frost and A. V. Phelps for a range of E/N. The swarm parameter from the study are expected to server as a critical test of current theories of low energy scattering by atoms and molecules.