Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The study of electron transport coefficients in pure $CF_4$ by 2-term approximation of the Boltzmann equation

2항근사 볼츠만 방정식을 이용한 $CF_4$분자가스의 전자수송계수의 해석

  • 전병훈 (중부대학교 컴퓨터응용설계학과) ;
  • 하성철 (동국대학교 전기공학과)
  • Published : 2001.05.11
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Abstract

We measured the electron transport coefficients(the electron drift velocity, W, and the longitudinal diffusion coefficient, $D_L$) in pure $CF_4$ over the E/N range from 0.04 Td to 250 Td by the double shutter drift tube. And these electron transport coefficients in pure $CF_4$ were calculated over the E/N range from 0.01 to 250 Td at 1 Torr by using the two-term approximation of the Boltzmann equation.

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