Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2001.06b
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- Pages.243-246
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- 2001
Passivation layers that restrict Ageing Effects of Porous Silicon
다공질 실리콘의 에이징 효과를 억제하기 위한 보호막
Abstract
At atmosphere photoluminescence(PL) of porous silicon(PSi) decreases and peak wave number of PL is shifted to blue region. When PS is used light detector, the ageing effects are negative phenomena. For controling ageing effects, this paper uses Polymers.
Keywords