한국마이크로전자및패키징학회:학술대회논문집 (Proceedings of the International Microelectronics And Packaging Society Conference)
- 한국마이크로전자및패키징학회 2001년도 The IMAPS-Korea Workshop 2001 Emerging Technology on packaging
- /
- Pages.146-150
- /
- 2001
Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD
- Kim, Tae-Gon (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Lee, Su-Youn (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Park, Jin-Goo (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Shin, Hyung-Jae (Core Technology Research Center, Samsung electronics Co. Ltd.)
- 발행 : 2001.07.01