내장형 캐패시터의 설계 파라미터 추출에 관한 연구

Design parameters of embedded capacitors

In this research, the design parameters of embedded capacitors are extracted by modeling and fabrication. The traditional library of capactor has a few problems in applying the circuit. Its capacitance is discrete, so target values in any circuit often can't be obtained in library, To solve this problem, the characteristics of capacitors are detected in the variation with the shape and structure, and then the capacitors with the expected reactance value at target frequency are obtained, In this procedure, 3-dimensional structure simulation is performed to predict the characteiristics of capacitors.