Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
- /
- Pages.729-732
- /
- 2001
The Structural and Electrical Properties of Vanadium Oxide Thin Films as $O_2/(Ar+O_{2})$ ratio
$O_2/(Ar+O_{2})$ 비에 따른 바나듐 산화막의 구조적, 전기적 특성
Abstract
In this study, the effect of oxygen partial pressure on the electrical properties of vanadium oxide(VO