Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.04b
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- Pages.134-138
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- 2000
Characteristics of Chromiun Nitride Thin-film Strain Guges
크로질화박막 스트레인 게이지의 특성
Abstract
The physical, electrical and piezoresitive characteristics of CrN(chromiun nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5~25 %)
Keywords
- chromiun nitride;
- thin-film;
- strain gauge;
- temperature coefficient of resistance;
- gauge factor;
- hysterisis;
- aging effect;
- I/V/T curve