Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.11a
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- Pages.492-495
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- 2000
Improvement of characteristics and dependence on underlayer substrate temperature of CoCrTa/Ti double layer
CoCrTa/Ti 이층막의 하지층기판온도의존성 및 특성개선
Abstract
In order to develop an ultra-thin CoCr perpendicular magnetic recording layer, we prepared CoCrTa/Ti double layer for perpendicular magnetic recording media by new facing targets sputtering system, Crystallgraphics and magnetic characteristics of CoCrTa on underlayer substrate temperature have been investigated. Crystallgraphic and magnetic characteristic of thin films were evaluated by X-ray diffractometry(XRD), vibrating sample magnetometer(VSM) and atomic force microscopy(AFM). The coercivity and anisotropy field was increased by increasing under layer substrate temperature, c-axis orientation of CoCrTa magnetic recording layer was improved 8
Keywords
- New facing targets sputtering;
- CoCrTa/Ti;
- ${\vartriangle}{\theta}_{50}$;
- grain size;
- perpendicular coercivity;
- anisotropy field