한국항해항만학회:학술대회논문집 (Proceedings of the Korean Institute of Navigation and Port Research Conference)

한국항해항만학회 (Korean Institute of Navigation and Port Research)
권호 표지

Phase Stability of Bi2212 and Bi2223 Thin Films Fabricated by Ion Beam Sputtering

  • Lee, Hee-Kab (Department of electrical & Electronic Eng., Dongshin University) ;
  • Park, Yong-Pil (Department of electrical & Electronic Eng., Dongshin University) ;
  • Kim, Jeong-Ho (Department of Mechatronics Eng., Changwon National University)
  • 발행 : 2000.11.01
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초록

Bi2212 and Bi2223 thin films are fabricated by ion beam sputtering method. Three phases of Bi2201, Bi2212 and Bi2223 appear as stable ones in spite of the condition for thin film fabrication of Bi2212 and bi2223 compositions, depending on substrate temperature(T$\sub$sub/) and ozone pressure (PO$_3$). It is found out that these phases show similar T$\sub$sub/ and PO$_3$dependence, and that the stable regions of these phases are limited within very narrow temperature.

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