Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
- /
- Pages.47-50
- /
- 2000
Reactive RF Magnetron Sputter Deposited $Y_2O_3$ Films as a Buffer Layer for a MFIS Transistor
- Lim, Dong-Gun (School of Electrical and Computer Engineering, Sungkyunkwan University) ;
- Jang, Bum-Sik (School of Electrical and Computer Engineering, Sungkyunkwan University) ;
- Moon, Sang-Il (School of Electrical and Computer Engineering, Sungkyunkwan University) ;
- Junsin Yi (School of Electrical and Computer Engineering, Sungkyunkwan University)
- Published : 2000.07.01
Abstract
This paper investigated structural and electrical properties of