Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2000.11a
  • /
  • Pages.551-554
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  • 2000
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
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Development of Three D.O.F. Alignment Stage for Vaccume Environment

진공용 3 자유도 얼라인먼트 스테이지 개발

  • 박희재 (서울대 기계공학부) ;
  • 박종호 (서울대 대학원 기계공학부) ;
  • 한상진 (서울대 대학원 기계공학부)
  • Published : 2000.11.01
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Abstract

Alignment system is a system to locate an object to it's accurate position in multi-d.o.f space. According to process of application, it is need to align an object in 3 or 6 d.o.f. space. And alignment system is used in various environments. Especially in PDP application, alignment process is carried out in vaccume environment. In this paper, we developed 3 d.o.f. alignment system for vaccume environment, performed kinematic analysis and improved it's positional accuracy.

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