Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.05a
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- Pages.23-23
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- 1999
Characteristics of Pt/Ru Bottom Electrode Deposited on poly-Si by Metalorganic Chemical Vapor Deposition
유기화학기상증착법에 의해 poly-Si위에 증착된 Pt/Ru 하부전극의 특성연구
- Choi, Eun-Suck (Department of Materials Engineering, Chungnam National University) ;
- Hwang, Jun-Sik (Department of Materials Engineering, Chungnam National University) ;
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Yoon, Soon-Gil
(Department of Materials Engineering, Chungnam National University)
- Published : 1999.05.01
Abstract
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