Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.578-581
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- 1999
Preparation of Co-Cr-Ta recording layers by FTS
FIS에 의한 Co-Cr-Ta 기록층의 제작
Abstract
The Co-Cr-Ta films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) system has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrates. In this study, we investigated the effect underlayers on the growths layers of Co-Cr-Ta recording layers. The Co-Cr-Ta/Ti(CoCr) double layers were deposited with sputter gas pressure
Keywords
- Facing Targets Sputtering;
- Perpendicular Magnetic Recording Media;
- Co-Cr-Ta Thin Films;
- c-axis Orientation;
- Coercivity
- 대향타겟스퍼터링;
- 수직자기기록매체;
- Co-Cr-Ta박막;
- C-축배 향;
- 보자력;