Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
- /
- Pages.150-153
- /
- 1999
The Fabrication of Micro-Heater MgO Medium Layer and It`s Characteristics
산화마그네슘을 매개층으로 이용한 백금박막 미세발열체의 제작과 그 특성
Abstract
The electrical and physical characteristics of MgO and Pt thin-films on Si wafers deposited by r.f magnetron sputtering, were analyzed with annealing condition(100
Keywords