Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
- /
- Pages.118-121
- /
- 1999
A Study on Characteristic of the 14/50/50 PLZT Thin Film for DRAM Capacitor
고집적 DRAM소자용 14/50/50 PLZT 박막의 특성에 관한 연구
Abstract
PLZT thin films were fabricated with different energy density by pulsed laser deposition. PLZT films deposited on Pt/Ti/SiO
Keywords