Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.34-38
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- 1999
A Study on Etching of Molybdenum by MERIE Metal Etcher
MERIE형 금속 식각기에 의한 몰리브덴 식각 연구
Abstract
In this study, molybdenum thin films were etched with the various Cl
Keywords
- MERIE(magnetically enhanced reactive ion etchings);
- Molybdenum(Mo);
- XPS(X-ray photoelectron spectroscopy)