Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on Structural and Dielectric Properties of the ((Ba,Sr)TiO$_3$ Thin Films by Sol-Gel Method

Sol-Gel법으로 제작된 (Ba,Sr)O$_3$ 박막의 구조 및 유전특성에 관한 연구

  • 홍상기 (연세대학교 전기공학과) ;
  • 김성구 (연세대학교 전기공학과) ;
  • 마석범 (용인송담대학 전기설비과) ;
  • 장낙원 (삼성전자 반도체연구소) ;
  • 백동수 (한국과학기술연구원 박막기술연구센터)
  • Published : 1999.11.01
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Abstract

(Ba$_{0.5}$Sr$_{0.5}$)TiO$_3$ thin films were fabricated at different RTA temperatures and thicknesses by Sol-Gel method. Solution consisting of acetate powders and titanium isopropoxide in a mixture of acetic acid and ethylene glycol were spin coated onto Pt/Ti/SiO$_2$/Si substrates. The films were annealed in the temperature range of 650~80$0^{\circ}C$ for 3 minutes by rapid thermal annealing. These BST thin films were fully crystallized at 75$0^{\circ}C$ and showed a maximum dielectric constant value of $\varepsilon$$_{r}$=~468 and dielectric loss was ~0.025 at a thickness of approximately 4000$\AA$.EX>.>.

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