한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1999년도 추계학술발표강연 및 논문개요집
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- Pages.132-132
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- 1999
플라즈마 MOCVD를 이용한 $SrTiO_3$ 박막 증착 메카니즘
Deposition Mechanism of $SrTiO_3$ Thin Films by Plasma Enhanced Metal Organic Chemical Vapor Deposition
- Choi, R.J. (School of Chemical Engineering & Technology, Chonbuk National University) ;
- Jeong, T. (School of Chemical Engineering & Technology, Chonbuk National University) ;
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Hahn, Y B.
(School of Chemical Engineering & Technology, Chonbuk National University) ;
- Hong, J. (Samsung Semiconductors R &D Center)
- 발행 : 1999.11.01