대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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Driving silicon membrane with electromagnetic force

  • Kim, Yong-Sung (School of Electrical Engineering, Seoul National University) ;
  • Ahn, Si-Hong (School of Electrical Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University)
  • 발행 : 1998.11.28
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초록

Silicon membrane to be used for micropump is fabricated and the deflection of the membrane driven by the electromagnetic force is measured. Silicon and glass are anodic bonded and Si is thinned. Silicon membrane is fabricated by the glass etching. The gold pattern can be protected against HF by the washing and fixing process under the glass etching process. The electromagnetic force is gained by the magnetic field driven by the current flowing through two coils. Deflection of the silicon membrane has a tendency of increasing with the increase of the driving current.

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