대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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- Pages.1017-1019
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- 1998
자기변형 박막을 이용한 마이크로 펌프의 제작과 시험
Fabrication and Test of a Micro Pump with a Magnetostrictive diaphragm
- Seo, Jee-Hoon (School of Electronics Engineering, Ajou University) ;
- Jeong, Ok-Chan (School of Electronics Engineering, Ajou University) ;
- Yang, Sang-Sik (School of Electronics Engineering, Ajou University)
- 발행 : 1998.11.28
초록
In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.
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