Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A study on the optimal design of a field emitter fabricated by CMP Process

CMP 공정에 의해 제작된 전계 방출기린 최적 설계에 관한 연구

  • Kim, Kwi-Hyun (Dept. of Eiectrical Engineering, Hanyang University) ;
  • Shin, Yang-Ho (Dept. of Eiectrical Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Eiectrical Engineering, Hanyang University)
  • Published : 1998.11.28
Download PDF
⟨ Previous Next ⟩

Abstract

Numerical simulation has been performed on a microtip field emitter structure produced by employing a CMP technology. The field distributions are estimated by using a Maxwell 2D vector simulator and the electron trajectories are obtained by solving the equation of ballistic motion of emitted electrons. The beam width observed at the phosphor has been characterized as a function of the applied voltages and the gate-to-tip distance. It has also been investigated how the electron trajectory is changed by adopting the anode switching as well as the focus electrode.

Keywords