Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.11a
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- Pages.287-290
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- 1998
A Study on the Dielectric Properties of Ferroelectric Materials
강유전체의 유전율 특성에 관한 연구
- Cho, Ik-Hyun ;
-
Park, Young
;
- Jeong, Kyu-Won ;
- Jung, Se-Min ;
- Yi, Jun-Sin ;
- Song, Jun-Tae
- Published : 1998.11.01
Abstract
It was investigated that the dielectric properties of ferroelectric materials using PZT-5A and PZT thin films. PZT-5A was 20mm diameters, 0.71mm, 0.51mm and 0.41mm thickness respectively and having c-axis preferred orientation. Electrodes(Al) were deposited by evaporation method. PZT thin film was deposited on Pt/SiO