Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.11a
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- Pages.44-45
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- 1998
Characteristics of $TiB_2$ thin films deposited by Sputtering process
Sputtering법으로 제조한 $TiB_2$ 박막의 특성
Abstract
Keywords