Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.05a
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- Pages.158-159
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- 1998
Characterization of YSZ(Yttria-stabilized zirconia) thin film by RF-magnetron sputtering
RF-magnetron sputtering를 이용한 YSZ(Yttria-stabilized zirconia)박막의 제조 및 특성 평가
Abstract
Keywords