Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.78.1-78
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- 1998
OPTIMIZATION OF TUNGSTEN PLUG CHEMICAL MECHANICAL POLISHING USING THE DIFFERENT CONSUMABLES
- Jung, Sung-Pyo (FAB division, ANAM SEMICONDUCTOR INC.) ;
- Kim, Hyo-Sang (FAB division, ANAM SEMICONDUCTOR INC.) ;
- Kim, Sang-Yong (FAB division, ANAM SEMICONDUCTOR INC.) ;
- Park, Jae-Sung (FAB division, ANAM SEMICONDUCTOR INC.)
- Published : 1998.08.01
Abstract
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