ELECTRICAL PROPERTIES OF COPPER THIN FILMS PREPARED BY MOCVD

  • Cho, N.I. (Dept. of Electronics Eng., Sun Moon University) ;
  • Park, D.I. (Dept. of Electronics Eng., Sun Moon University) ;
  • Nam, H.G. (Dept. of Electronics Eng., Sun Moon University) ;
  • Kim, C.K. (Dept. of Electrical Eng. Soonchenhuang Univ.)
  • Published : 1998.08.01