Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.106.3-106
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- 1998
TEMPORAL AGING OF SiO$_2$ XEROGEL THIN FILM FOR INTERMTAL DIELECTRIC APPLICATION
- Kim, J. H. (Dept. of Ceramic Eng., Yonsei Univ.) ;
- Park, H. H. (Dept. of Ceramic Eng., Yonsei Univ.)
- Published : 1998.08.01
Abstract
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