Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.106.4-106
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- 1998
MICROSTRUCTURE AND DIELECTRIC PROPERTY OF ECRCVD a-C:H:F/a-C:H FILMS FOR LOW-k INTERLAYER DIELECTRICS,
- Yang, Sung-Hoon (Dept. of Metallurgical Eng.. Hanyang Univ) ;
- Lee, Seog-Hyeong (Dept. of Metallurgical Eng.. Hanyang Univ) ;
- Park, Jeong-Won (Dept. of Metallurgical Eng.. Hanyang Univ) ;
- Kim, Jung-Yeul (Dept. of Metallurgical Eng.. Hanyang Univ) ;
- Park, Jong-Won (Dept. of Metallurgical Eng.. Hanyang Univ)
- Published : 1998.08.01
Abstract
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