Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.103.4-103
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- 1998
THERMAL DECOMPOSITION OF TETRAKIS-DIMETHYL-AMIDO-TITANIUM AND TETRAKIS-DIETHYL-AMIDO-TITANIUM USED FOR TiN MOCVD.
- Yun, Ju-Y. (Dept. of Chemical Engineering, POSTECH) ;
- Park, Man-Y. (Dept. of Chemical Engineering, POSTECH) ;
- Rhee, Shi-Woo (Dept. of Chemical Engineering, POSTECH)
- Published : 1998.08.01
Abstract
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