Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.103.3-103
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- 1998
THERMAL STABILITY OF Nb-Si-N BARRIERS
- Bae, Hyung-Jin (Dept. of Met. Eng., Inha University) ;
- Shin, Young-Hoon (Dept. of Met. Eng., Inha University) ;
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Lee, Chong-Mu
(Dept. of Met. Eng., Inha University)
- Published : 1998.08.01
Abstract
Keywords