Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.41.2-41
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- 1998
EFFECTS OF THE INTERLAYER DIELECTRICS ON THE ELECTRICAL PORPERTIES OF Pt/SrBi$_2$ Ta$_2$ O$_9$ /Pt CAPACITORS FOR NON-VOLATILE MEMORY APPLICATION
- Hong, Suk-Kyoung (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Kim, Jae-Whan (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Kang, Young-Min (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Lee, Seok-Won (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Lee, Chang-Koo (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Suh, Chung-Won (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
- Lee, J. (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd)
- Published : 1998.08.01
Abstract
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