EFFECTS OF THE INTERLAYER DIELECTRICS ON THE ELECTRICAL PORPERTIES OF Pt/SrBi$_2$Ta$_2$O$_9$/Pt CAPACITORS FOR NON-VOLATILE MEMORY APPLICATION

  • Hong, Suk-Kyoung (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Kim, Jae-Whan (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Kang, Young-Min (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Lee, Seok-Won (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Lee, Chang-Koo (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Suh, Chung-Won (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd) ;
  • Lee, J. (Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd)
  • Published : 1998.08.01