Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Formation of copper films from copper formate by laser-induced pyrolytic decomposition

Copper formate의 레이저 유도 열 분해에 의한 Cu 박막의 제조

  • Kim, Jae-Kwon (Dept. of Electrical Engineering, Inha University) ;
  • Park, Se-Ki (Dept. of Electrical Engineering, Inha University) ;
  • Lee, Cheon (Dept. of Electrical Engineering, Inha University)
  • 김재권 (인하대학교 전기공학과) ;
  • 박세기 (인하대학교 전기공학과) ;
  • 이천 (인하대학교 전기공학과)
  • Published : 1998.07.20
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Abstract

Direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films using a focused argon ion laser beam($\lambda$ =514.5nm) on a glass. The thickness and linewidth of the deposited copper films were considered as a function of laser power and scan speed. As the result from AES, there are no other elements except for copper after decomposition in the atmospheric ambient.

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