Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
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- Pages.89-89
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- 1997
Low Temperature Crystallization of PECVD a-Si Films Adsorbed with Al and Ni by Spin Coating
스핀코팅법으로 Al, Ni을 흡착시킨 PECVD 비정질 실리콘 박막의 저온결정화 거동
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