Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.10a
- /
- Pages.78-78
- /
- 1997
The Effects of Cu Deposition Conditions on the Adhesion of Sputter-deposited Cu/Cr Film on Polyimide
스퍼터 증착한 Cu/Cr/Polyimide 시스템에서의 Cu의 증착조건에 따른 접착력 거동
Abstract
Keywords