Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
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- Pages.106-106
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- 1997
Effect of Deposition Rate on the Crystallization Behavior of LPCVD Amorphous Silicon Film
증착속도에 따른 LPCVD 비정질실리콘 박막의 고상결정화거동
Abstract
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