High Temperature Ohmic Contact to epitaxial n-type $\beta$-SiC thin films

  • Park, Yeon-Shik (School of Mat. Sci. Eng., Seoul National University) ;
  • Wook Bahng (School of Mat. Sci. Eng., Seoul National University) ;
  • Cho, Ho-Jin (School of Mat. Sci. Eng., Seoul National University) ;
  • Kim, Hyeong-Joon (School of Mat. Sci. Eng., Seoul National University)
  • 발행 : 1997.05.01